Electron beam deposition: for depositing thin films onto a given substance
Sputter coatings: emissions mitigation and re-radiation physics films
Ion beam assisted deposition
Parylene polymer coatings
Glow Discharge Polymer System (GDP) and plasma etch
Optical Thin Films
Diagnostic/target systems development
Optical mirrors
Anti-reflective coatings
Precision beam splitters
polarizers
High purity films, offering improved control of co-deposits, faster turnaround, higher yield
Component Assembly
Cleaning Processes
Hydrogen vacuum firing furnace: molecular cleaning by reduction of oxides and removal of organic materials
UV ozone cleaner to prepare hardware for emissions mitigation and re-radiation physics films, and to remove hydrocarbons and dielectric inclusion from power flow surfaces
C-5 Ion Assist Deposition optical coating of
thin films (630 torr-1.0 X 10 -7 torr)
